Machine: Nano-Imprinting Machine With Alignment Functions

Model: GD-N-A03

Functions:

To perform UV NIL with alignment functions

Alignment Accuracy within 5um

Capable for double side alignment

For wafers with 4,6,8 inches

Auto wafer handling and transfer, capable for auto production 

Imprinting resolution down to 20nm

Aspect Ratio up to 10:1

Capable for slanted grating imprinting

Capable to imprint resist with high etching selectivity