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Machines

Fully Autoed Nano Imprinting Machine for AR grating fabrications

Classification:Machines

Specifications:GD-2C-N-R300

Release time:2022-08-17

Visits:334

Consultation details

Product overview:

Machine: Fully Autoed Nano Imprinting Machine for AR grating fabrications

Model: GD-2C-N-R300


Functions:

Up to 12inch wafers

Integrated Wafer cleaning, resist spin-coating, resist pre-baking

Fully autoed wafer transfer

Fully autoed working stamp fabrication and imprinting process

Resolution to 20nm

Aspect Ratio up to 10:1

Capable to imprint resist with high etching selectivity

ChangShu Factory Address: Building 7C, No.2 JianYe Road, ChangShu Yushan Zone, ChangShu, CHINA

SuZhou Industrial Park Address: 302, Building 13, Nanopolis SuZhou, SuZhou Industrial Park, Suzhou, CHINA

Telephone:0512 51915206

Mailbox:47179145@qq.com, service@gdnano.com