Machine: Roll-to-Plate Nano-imprinting Machine

Model: GD-N-R03

Functions:

Compatible for 4, 6 and 8inch wafers

Auto wafer handling and transfer, able for auto-productions

Imprinting Resolution: down to 20nm

Imprinting Aspect Ratio: 10:1

Capable for Slant grating  imprinting

Capable for resist with high etching selectivity